CN202256115U - Dust particle online monitoring system for clean room - Google Patents
Dust particle online monitoring system for clean room Download PDFInfo
- Publication number
- CN202256115U CN202256115U CN2011203341762U CN201120334176U CN202256115U CN 202256115 U CN202256115 U CN 202256115U CN 2011203341762 U CN2011203341762 U CN 2011203341762U CN 201120334176 U CN201120334176 U CN 201120334176U CN 202256115 U CN202256115 U CN 202256115U
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- dust particle
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- toilet
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Abstract
The utility model discloses a dust particle online monitoring system for a clean room, which comprises a plurality of dust particle counting sensors, a wireless router, a wireless receiving nodal point device, a route device and a monitoring terminal. The dust particle counting sensors are installed at a plurality of detection points of the clean room. Each dust particle counting sensor comprises a dust particle collection pipe, a communication interface and a light battery. The light battery converts light energy into electric energy to supply power to each dust particle counting sensor. The dust particle counting sensors adopt light batteries to replace the prior power supply adapters, the light batteries can convert light energy of a fluorescent lamp into electric energy, so that installation of the dust particle counting sensors is not limited through the power supply adapters. The wireless router and the wireless receiving nodal point device are adopted in the clean room to conduct wireless transmission and receiving on data collected by the dust particle counting sensors. No reticle is required to be installed in the clean room, pollution of organic silicon on the surface of the reticle is avoided, and dust collection sources in the clean room are reduced.
Description
Technical field
The utility model relates to electronic monitoring and control system, relates in particular to a kind of toilet dust particle online monitoring system.
Background technology
The toilet adopts instruments such as desk-top airborne particle counter, differential manometer and Hygrothermograph to carry out the flow-type test at present; At first arrange the sampled point planimetric map; Test the air particles number of each sampled point then with desk-top airborne particle counter flow-type; At last data are imported computer, disposal data is drawn the dust particle distribution plan.
According to toilet's design specifications, when arranging sampled point, the sampled point number is confirmed with toilet's area extraction of square root.These points only are the dust particle test points under toilet's overall situation, do not comprise the dust particle reference mark on the concerned process steps, and the particle counting sensor is installed dumb, can not detect the dust particle number on each operation.
Existing multipoint detection device all use an air pump at each point, and air pump is a kind of new pollution source of toilet.
Existing online airborne particle counter; All need use a power supply adaptor to supply power at each online dust particle sensor; So just limited online airborne particle counter installation site; The sampling pipe lengthening that can cause online airborne particle counter, the dust particle that causes collecting changes greatly when arriving airborne particle counter.
In a word; Though conventional online formula airborne particle counter has reached the purpose of real-time monitoring dust particle number; But because in use every sensor for countering all needs a power supply adaptor, a netting twine; It is succinct inadequately to make that the toilet arranges, and sends out the dirt source and increase, and takes into account the dust particle monitoring less than the high operation of cleanliness factor.Netting twine and power supply adaptor are bigger to send out dirt source (control of dust source) at present, and the netting twine surface contains compositions such as organosilicon, in the electron trade toilet, ban use of.
The utility model content
The technical matters that the utility model will solve is that the airborne particle counter installation of toilet in the prior art is dumb; And cause the defective that increase in the control of dust source in the toilet because carrying out online dust particle, a kind of toilet's dust particle online monitoring system that the dust particle sensor can be installed flexibly and can reduce the control of dust source is provided.
The utility model solves the technical scheme that its technical matters adopted:
A kind of toilet dust particle online monitoring system is provided; Comprise a plurality of dust particle sensors, wireless route, wireless receiving node device, routing device and monitor terminal; Said dust particle sensor is installed in a plurality of check points of toilet; Said dust particle sensor pack including dust dust particle sampler pipe, data sending apparatus and photoelectric cell; Said photoelectric cell is converted into electric energy with luminous energy and gives said dust particle sensor power supply; Said dust particle sampling pipe places toilet's vacuum air-channel; Said dust particle sensor is given said wireless route with the dust particle data of gathering through said data sending apparatus wireless transmit, and said wireless route sends to said wireless receiving node device with the data wireless that receives again, through said routing device data is passed to said monitor terminal again and carries out on-line monitoring.
In the described toilet of the utility model dust particle online monitoring system; Said data sending apparatus comprises communication interface and wireless launcher, and said dust particle sensor is wirelessly sent to said wireless route through said wireless launcher after the dust particle data of gathering are changed through said communication interface again.
In the described toilet of the utility model dust particle online monitoring system, said communication interface is the communication interface of RS485.
In the described toilet of the utility model dust particle online monitoring system, said monitor terminal is the computing machine that the PLC system is installed and can monitors the variation tendency of the dust particle number of each check point in the toilet according to the dust particle data in real time of obtaining.
Employing the utlity model has following beneficial effect: the dust particle sensor in the utility model adopts photoelectric cell to replace original power supply adaptor; This photoelectric cell can be converted into electric energy with the luminous energy like daylight lamp, makes the installation of dust particle sensor not receive the restriction of power supply adaptor; In the toilet, adopt wireless route and wireless receiving node device that the data of dust particle sensor acquisition are carried out wireless transmission and reception, need not netting twine is installed in the toilet, avoided the pollution of netting twine surface silicon, reduced the control of dust source in the toilet.
Description of drawings
To combine accompanying drawing and embodiment that the utility model is described further below, in the accompanying drawing:
Fig. 1 is the structural representation of the utility model embodiment toilet dust particle online monitoring system.
Embodiment
For the purpose, technical scheme and the advantage that make the utility model is clearer,, the utility model is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
In the preferred embodiment toilet of the utility model dust particle online monitoring system; As shown in Figure 1; Comprise a plurality of dust particle sensors; Like dust particle sensor a1, a2 ... AN, this system also comprise wireless route 20, wireless receiving node device 30, routing device 40 and monitor terminal 50.
A plurality of dust particle sensors are installed in a plurality of check points of toilet respectively; The structure of the dust particle sensor in the utility model is all identical; With dust particle sensor a1 is example; Comprise dust particle sampling pipe 11, data sending apparatus 12 and photoelectric cell 13; Photoelectric cell 13 is converted into electric energy with luminous energy (like the light of daylight lamp) and gives the power supply of dust particle sensor; And need not all to be equipped with a power supply adaptor for each dust particle sensor, the installation of dust particle sensor does not receive the restriction (because power supply adaptor need be inserted in the supply socket) of power supply adaptor yet, thereby can be installed in each monitoring point in the toilet flexibly.Replace traditional power supply adaptor also to reduce a dirt or a control of dust of toilet with photoelectric cell simultaneously.In the utility model embodiment toilet dust particle online monitoring system, it is the photoelectric cell of 2CU10A that photoelectric cell 13 can adopt model.
Dust particle sampling pipe 11 places toilet's vacuum air-channel, thereby need not into each check point in the toilet air pump to be installed, and has reduced pollution source.The dust particle data that dust particle sensor a1 gathers dust particle sampling pipe 11 are transferred to wireless route 20 through data sending apparatus 12; Wireless route 20 sends to wireless receiving node device 30 with the data wireless that receives again, through routing device 40 data is passed to monitor terminal 50 again and carries out on-line monitoring.
In the utility model embodiment toilet dust particle online monitoring system; Data sending apparatus 12 comprises communication interface and wireless launcher, and the dust particle sensor is wirelessly sent to said wireless route through wireless launcher after the dust particle data of gathering are changed through communication interface again.In the present embodiment, it is the communication interface of RS485 that communication interface adopts model.
Further, in the utility model embodiment toilet dust particle online monitoring system, wireless route 20 places in the toilet with wireless receiving node device 30; It adopts Radio Transmission Technology; Need not to use netting twine, thereby avoided the pollution of netting twine surface silicon, reduced the control of dust source.Routing device 40 places outside the toilet with monitor terminal 50, is convenient to remote on-line monitoring.The monitor terminal 50 of the utility model embodiment can carry out on-line monitoring to the measured data in a plurality of toilets; After the wireless receiving node device 30 of each toilet was given routing device 40 with data transmission, routing device 40 can be passed to monitor terminal 50 with data again through wired mode.
In the utility model embodiment toilet dust particle online monitoring system; Monitor terminal 50 is for being equipped with (the PLC:Programmable Logic Control of PLC system; Be the FPGA control system) and can be according to the computing machine of the variation tendency of the dust particle number of each check point in the dust particle data in real time monitoring toilet that obtains; At monitor terminal 50 the PLC Control Software is installed, realizes the real time and on line monitoring of dust particle.At monitor terminal 50 respective gateway can be set, routing device 40 must could send data to monitor terminal 50 through this gateway.
Employing the utlity model has following beneficial effect: the dust particle sensor in the utility model adopts photoelectric cell 13 to replace original power supply adaptor; This photoelectric cell 13 can be converted into electric energy with the luminous energy like daylight lamp, makes the installation of dust particle sensor not receive the restriction of power supply adaptor; In the toilet, adopt wireless route 20 data of dust particle sensor acquisition to be carried out wireless transmission and reception with wireless receiving node device 30; Need not in the toilet, to install netting twine; Avoid the netting twine organosilyl pollution in surface, reduced the control of dust source in the toilet.In addition, adopt in the dust particle sensor and be no more than 1 meter dust particle sampling pipe 11, make data measured more accurate.
Should be understood that, concerning those of ordinary skills, can improve or conversion, and all these improvement and conversion all should belong to the protection domain of the utility model accompanying claims according to above-mentioned explanation.
Claims (4)
1. toilet's dust particle online monitoring system; It is characterized in that; Comprise a plurality of dust particle sensors, wireless route, wireless receiving node device, routing device and monitor terminal; Said dust particle sensor is installed in a plurality of check points of toilet; Said dust particle sensor pack including dust dust particle sampler pipe, data sending apparatus and photoelectric cell; Said photoelectric cell is converted into electric energy with luminous energy and gives said dust particle sensor power supply, and said dust particle sampling pipe places toilet's vacuum air-channel, and said dust particle sensor is given said wireless route with the dust particle data of gathering through said data sending apparatus wireless transmit; Said wireless route sends to said wireless receiving node device with the data wireless that receives again, through said routing device data is passed to said monitor terminal again and carries out on-line monitoring.
2. toilet according to claim 1 dust particle online monitoring system; It is characterized in that; Said data sending apparatus comprises communication interface and wireless launcher, and said dust particle sensor is wirelessly sent to said wireless route through said wireless launcher after the dust particle data of gathering are changed through said communication interface again.
3. toilet according to claim 2 dust particle online monitoring system is characterized in that said communication interface is the communication interface of RS485.
4. toilet according to claim 1 dust particle online monitoring system; It is characterized in that said monitor terminal is the computing machine that the PLC system is installed and can monitors the variation tendency of the dust particle number of each check point in the toilet according to the dust particle data in real time of obtaining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203341762U CN202256115U (en) | 2011-09-07 | 2011-09-07 | Dust particle online monitoring system for clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203341762U CN202256115U (en) | 2011-09-07 | 2011-09-07 | Dust particle online monitoring system for clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202256115U true CN202256115U (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011203341762U Expired - Lifetime CN202256115U (en) | 2011-09-07 | 2011-09-07 | Dust particle online monitoring system for clean room |
Country Status (1)
| Country | Link |
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| CN (1) | CN202256115U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102829848A (en) * | 2012-08-06 | 2012-12-19 | 无锡科之乾科技有限公司 | Remote monitoring system and detection method for particulate depositing quantity |
| CN102841047A (en) * | 2012-08-31 | 2012-12-26 | 深圳市华星光电技术有限公司 | Cleanness monitoring system and cassette |
| CN102861737A (en) * | 2012-09-26 | 2013-01-09 | 深圳市华星光电技术有限公司 | Clean room and automatic cleaning box thereof |
| CN104157124A (en) * | 2014-08-28 | 2014-11-19 | 无锡硅奥科技有限公司 | Laser dust particle counting and monitoring system based on Zigbee |
| CN106198362A (en) * | 2016-08-31 | 2016-12-07 | 南京理工大学 | Remote multi-point laser dust particle counter system |
| CN110398445A (en) * | 2019-07-22 | 2019-11-01 | 武汉格林威特科技有限公司 | Dustfree environment particle test macro |
-
2011
- 2011-09-07 CN CN2011203341762U patent/CN202256115U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102829848A (en) * | 2012-08-06 | 2012-12-19 | 无锡科之乾科技有限公司 | Remote monitoring system and detection method for particulate depositing quantity |
| CN102841047A (en) * | 2012-08-31 | 2012-12-26 | 深圳市华星光电技术有限公司 | Cleanness monitoring system and cassette |
| US20140067329A1 (en) * | 2012-08-31 | 2014-03-06 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Cleanliness Montioring System and Cartridges Thereof |
| WO2014032317A1 (en) * | 2012-08-31 | 2014-03-06 | 深圳市华星光电技术有限公司 | Cleanness monitoring system and cartridge |
| CN102861737A (en) * | 2012-09-26 | 2013-01-09 | 深圳市华星光电技术有限公司 | Clean room and automatic cleaning box thereof |
| CN102861737B (en) * | 2012-09-26 | 2015-04-01 | 深圳市华星光电技术有限公司 | Clean room |
| CN104157124A (en) * | 2014-08-28 | 2014-11-19 | 无锡硅奥科技有限公司 | Laser dust particle counting and monitoring system based on Zigbee |
| CN106198362A (en) * | 2016-08-31 | 2016-12-07 | 南京理工大学 | Remote multi-point laser dust particle counter system |
| CN110398445A (en) * | 2019-07-22 | 2019-11-01 | 武汉格林威特科技有限公司 | Dustfree environment particle test macro |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |