NIST scientists study CD-AFM tip lifetime and wear rate: impact on measurement variability and cost
Posted 20-04-10 00:06 | Permalink: www.nanotools.com/blog/nist-scientists-study-cd-afm-tip-lifetime-and-wear-rate-impact-on-measurement-variability-and-cost.html
Publication update:
nanotools CDR50-EBD probes used in study published by NIST researchers
Discover how the wear behavior of nanotools CDR50-EBD with controlled 50 nm diameter compare to that of standard CDR silicon probes.
- Title: Wear comparison of critical dimension-atomic force microscopy tips
DOI: 10.1117/1.JMM.19.1.014004 - Authors: Ndubuisi G. Orji, Ronald G. Dixson, Ernesto Lopez, Bernd Irmer
- Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
- Publisher: SPIE - Intl. Society for Optical Engineering
- Date: March 28, 2020
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